演講人Speaker： Fajun Yang (陽罰軍)
題 目Title：Scheduling Analysis for Cluster Tools with Sequence-dependent Completion Time under Release and Due Dates-related Constraints
時 間Time：2020 年1月6日上午10:00
地 點Venue：哈工大(深圳) A507
講座內容Seminar Content :
In semiconductor manufacturing, cluster tools are widely used in wafer fabrication plant to process wafers. Due to product customization, they are frequently required to switch from processing one type of lot to another, leading to ubiquitous lot switching periods, during which consecutive lots are processed concurrently for enhancing the utilization of the tools. As different lots overlaps usually result in different completion time for each of the lots, the completion time is sequence-dependent. In this work, an efficient generalized backward strategy with no deadlock is introduced for the lot switching period of single-armed cluster tools, based on which, closed-form expressions of the completion time of lots are presented. At last, a mixed-integer programming model is developed to decide the optimal processing sequence of a list of lots that are either waiting or being released from the preceding steps at certain release dates considering the due date-related constraint. The objective of the model is to minimize the total weighted tardiness, which has been proved to be strongly NP-hard.
Fajun Yang received the Ph. D. degree in Mechanical Engineering from Guangdong University of Technology, Guangzhou, China, in 2016. From 2015.09 -2016.09, he was a Visiting Student with New Jersey Institute of Technology, Newark, NJ, USA. From 2017.01-2019.05, He was a Research Fellow with Nanyang Technological University, Singapore, and He is currently a Postdoctoral Researcher with “Humboldt Research Fellowship for Postdoctoral Researchers” in Hagen University, Germany. He has 30+ international journal papers (majority in the IEEE Transactions) and patents. His interests are Production Planning and Scheduling on the Intelligent Manufacturing Systems and AI-supported Automated Guided Vehicles, Petri Nets, Operation Research, and Supply Chain Management